Emerging miniaturized energy storage devices for microsystem applications: From design to integration

The ever-growing demands for integration of micro/nanosystems, such as microelectromechanical system (MEMS), micro/nanorobots, intelligent portable/wearable microsystems, and implantable miniaturized medical devices, have pushed forward the development of specific miniaturized energy storage devices (MESDs) and their extreme manufacturing processes. Typically, MESDs are a type of miniaturized power supply with the electrode size in the range of micrometer, which cannot only serve as a compatible energy source for micro/nanosystems but also integrate with micro/nanodevices directly to satisfy the need for integration, intelligence, ultracompactness, and extremely lightweight. Thus, the MESDs are considered to be preferable compact energy sources for uninterrupted powering of integrated microsystems.