SUNY Polytechnic Institute Announces Funding from Onto Innovation Inc. for Advanced Metrology Methods to Improve High Volume Manufacturing of Memory Chips

SUNY Polytechnic Institute (SUNY Poly) announced today that Empire Innovation Professor of Nanoscale Science Dr. Alain Diebold has received funding from Onto Innovation Inc (“Onto Innovation” or “Onto”) to increase the capability of computer chip memory by characterizing the materials and multilayer structures which are used to fabricate high-aspect ratio 3D memory chips, such as DRAM. DRAM is used to temporarily store data to efficiently access and update code while a person interacts with their computer. This research initiative will deploy metrology methods to precisely measure the memory chip structures in order to enable high-volume manufacturing.