This document gives terms and definitions concerning nanofabrication processes in the field of nanotechnologies. It is only one part of a multi-part terminology and definition documentation covering different aspects of nanotechnology. In this document, all process-related terms refer to nanofabrication. Many of the processes mentioned do not relate exclusively to the nanoscale. Depending on whether the conditions are controllable or not, such processes can give rise to materials at the nanoscale or larger scales.