This part of IEC 62047 specifies the procedure for performing bulge tests (bulge / depth tests) on a free-standing layer that is curved within a window. The micro-sample is made from micro- / nano-layer materials, which include metal, ceramic or polymer layers for MEMS, microsystem or other components. The thickness of the layer is in the range from 0.1 μm to 10 μm and the width of the rectangular or square membrane window or the diameter of the circular membrane is in the range from 0.5 mm to 4 mm.
