Semiconductor devices - Micro-electromechanical devices. Part 45: Silicon based MEMS fabrication technology-Measurement method of impact resistance of nanostructures

Semiconductor devices - Micro-electromechanical devices. Part 45: Silicon based MEMS fabrication technology-Measurement method of impact resistance of nanostructures

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Standard Number BS EN IEC 62047-45
Organization British Standards Institution UK
Level National
Category Test Method | Characterization | Measurement
Status
  • MAR 2024 Under Development