Semiconductor devices. Micro-electromechanical devices. Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale thickness membrane

Semiconductor devices. Micro-electromechanical devices. Silicon based MEMS fabrication technology. Measurement method of tensile strength of nanoscale thickness membrane

Link To Website launch Link To Webstore
Standard Number BS IEC 62047-46:2025
Organization British Standards Institution UK
Level National
Category Test Method | Characterization | Measurement
Status
  • APR 2025 Published