Nanotechnologies – A guideline for ellipsometry application to evaluate the thickness of nanoscale films

Nanotechnologies – A guideline for ellipsometry application to evaluate the thickness of nanoscale films

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Standard Number DS/IEC/TR 63258:2021
Organization Danish Standards Denmark
Level National
Category Guide | Practice
Status
  • APR 2021 Published
ABSTRACT

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.