State system for ensuring the uniformity of measurements. Nanometer range relief measures with trapezoidal profile of elements. Methods for calibration

State system for ensuring the uniformity of measurements. Nanometer range relief measures with trapezoidal profile of elements. Methods for calibration

Standard Number GOST R 8.644-2008
Organization Federal Agency on Technical Regulating and Metrology Russia
Level National
Category Test Method | Characterization | Measurement
Status
  • JUN 2009 Published