State system for ensuring the uniformity of measurements. Nanometer range relief measures with trapezoidal profile of elements. Methods for calibration

State system for ensuring the uniformity of measurements. Nanometer range relief measures with trapezoidal profile of elements. Methods for calibration

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Standard Number GOST R 8.644-2008
Organization Federal Agency on Technical Regulating and Metrology Russia
Level National
Category Test Method | Characterization | Measurement
Status
  • JUN 2009 Published
  • MAR 2010 Revised
ABSTRACT

This standard applies to relief measures in the nanometer range with a trapezoidal profile of elements, the linear dimensions and material for which comply with the requirements of GOST R 8.628. Relief measures are used to measure linear dimensions in the range from 10 in the st. minus 9 to 10 in the st. minus 6 m. This standard establishes a methodology for calibrating relief measures.