State system for ensuring the uniformity of measurements Instruments measuring the characteristics of ultraviolet radiation of technological testing of nanophotolitography.Verification procedure

State system for ensuring the uniformity of measurements Instruments measuring the characteristics of ultraviolet radiation of technological testing of nanophotolitography.Verification procedure

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Standard Number GOST R 8.659-2009
Organization Federal Agency on Technical Regulating and Metrology Russia
Level National
Category Test Method | Characterization | Measurement
Status
  • JAN 2011 Published
  • AUG 2019 Revised
ABSTRACT

This standard applies to measuring instruments (MI) for the characteristics of ultraviolet (UV) radiation used in technological control in nanophotolithography and establishes a methodology for their initial and periodic verification.