State system for ensuring the uniformity of measurements. Reflectometers of the extreme ultraviolet radiation for measurements of the characteristics of multilayer nanostructures in the wavelength range 10 to 30 nm. Procedure of measurements

Standard Number GOST R 8.716-2010
Organization Federal Agency on Technical Regulating and Metrology Russia
Level National
Category Test Method | Characterization | Measurement
Status
  • JAN 2012 Published