State system for ensuring the uniformity of measurements. Reflectometers of the extreme ultraviolet radiation for measurements of the characteristics of multilayer nanostructures in the wavelength range from 10 to 30 nm. Measurements procedure

State system for ensuring the uniformity of measurements. Reflectometers of the extreme ultraviolet radiation for measurements of the characteristics of multilayer nanostructures in the wavelength range from 10 to 30 nm. Measurements procedure

launch Link To Webstore
Standard Number GOST R 8.716-2010
Organization Federal Agency on Technical Regulating and Metrology Russia
Level National
Category Test Method | Characterization | Measurement
Status
  • JAN 2012 Published
  • JUL 2019 Revised
ABSTRACT

State system for ensuring the uniformity of measurements. Reflectometers of the extreme ultraviolet radiation for measurements of the characteristics of multilayer nanostructures in the wavelength range from 10 to 30 nm.

Measurements procedure