State system for ensuring the uniformity of measurements. Nanometer range relief measures with trapezoidal profile of elements. Methods for verification

State system for ensuring the uniformity of measurements. Nanometer range relief measures with trapezoidal profile of elements. Methods for verification

Standard Number GOST R 8.629-2007
Organization Federal Agency on Technical Regulating and Metrology Russia
Level National
Category Test Method | Characterization | Measurement
Status
  • FEB 2008 Published