State system for ensuring the uniformity of measurements. Single-crystal silicon nanometer range relief measures. Requirements for geometrical shapes, linear sizes and manufacturing material selection

State system for ensuring the uniformity of measurements. Single-crystal silicon nanometer range relief measures. Requirements for geometrical shapes, linear sizes and manufacturing material selection

Standard Number GOST R 8.628-2007
Organization Federal Agency on Technical Regulating and Metrology Russia
Level National
Category Test Method | Characterization | Measurement
Status
  • FEB 2008 Published