Nanomanufacturing - Key Control Characteristics - Part 8-5: Nano-enabled metal-oxide interfacial devices - Oxygen distribution: Secondary ion mass spectrometry (SIMS)

Nanomanufacturing - Key Control Characteristics - Part 8-5: Nano-enabled metal-oxide interfacial devices - Oxygen distribution: Secondary ion mass spectrometry (SIMS)

Standard Number IEC TS 62607-8-5
Organization International Electrotechnical Commission World
Level International
Category Test Method | Characterization | Measurement
Status
  • JAN 2025 Under Development