Nanomanufacturing – key control characteristics – Part 10–1: Nanoelectronic devices – Capacitance: scanning microwave microscopy

Nanomanufacturing – key control characteristics – Part 10–1: Nanoelectronic devices – Capacitance: scanning microwave microscopy

Standard Number PNW TS 113-785
Organization International Electrotechnical Commission World
Level International
Category Test Method | Characterization | Measurement
Status
  • JUL 2023 Under Drafting