Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy

Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for surface roughness of fine ceramic films by atomic force microscopy

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Standard Number ISO/DIS 19606
Organization International Electrotechnical Commission World
Level International
Category Test Method | Characterization | Measurement
Status
  • JUL 2023 Under Development
ABSTRACT

ISO 19606:2017 describes a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy, of surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, RSm, in the range of about 0,04 μm to 2,5 μm.