Semiconductor devices - Micro-electromechanical devices - Part 47: Silicon based MEMS fabrication technology - Measurement method of bending strength of microstructures

Semiconductor devices - Micro-electromechanical devices - Part 47: Silicon based MEMS fabrication technology - Measurement method of bending strength of microstructures

Link To Website
Standard Number IEC 62047-47
Organization International Electrotechnical Commission World
Level International
Category Test Method | Characterization | Measurement
Status
  • APR 2024 Approved