Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment - Part 3: Nano-scale wafer surface inspection method using UV light

Semiconductor devices - Performance evaluation of semiconductor processing components and inspection equipment - Part 3: Nano-scale wafer surface inspection method using UV light

Standard Number IEC 63567-3
Organization International Electrotechnical Commission World
Level International
Category Test Method | Characterization | Measurement
Status
  • JUL 2025 Under Development