Nanotechnologies. Vocabulary. Part 8: Nanomanufacturing processes

This Peruvian Technical Specification defines terms related to nanomanufacturing processes in the field of nanotechnologies. All of the process terms in this document are relevant to nanomanufacturing, however many of the processes listed are not exclusively relevant to the nanoscale. Terms that are not exclusive are noted in the definitions. Depending on controllable conditions, such processes can result in material features at the nanoscale or, alternatively, at larger scales. There are many other terms that name tools, components, materials, system control methods, or metrology methods associated with nanomanufacturing that are beyond the scope of this document.