Microbeam analysis: Methods of specimen preparation for analysis of general powders using WDS and EDS

This document specifies specimen preparation methods for the analysis of particles in powders using energy-dispersive spectrometers (EDS) or wavelength-dispersive spectrometers (WDS) installed on an EPMA or SEM. The preparation methods for powder particle analysis are classified by the analytical purpose and the particle size.

This document applies to inorganic particles larger than 100 nm and smaller than 100 µm in diameter.

It applies only to analysis of "general" powders, which means that it excludes procedures for special applications such as forensic or trace analysis.