Artificial gratings used in nanotechnology -- Description and measurement of dimensional quality parameters

Artificial gratings used in nanotechnology -- Description and measurement of dimensional quality parameters

Standard Number IEC/TS 62622:2012
Organization International Organization for Standardization World
Level International
Category Specification
Status
  • OCT 2012 Published
ABSTRACT
IEC/TS 62622:2012(E), which is a technical specification, specifies the generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features, and provides guidance on the categorization of measurement and evaluation methods for their determination. This specification is intended to facilitate communication among manufacturers, users and calibration laboratories dealing with the characterization of the dimensional quality parameters of artificial gratings used in nanotechnology. This specification supports quality assurance in the production and use of artificial gratings in different areas of application in nanotechnology. Whilst the definitions and described methods are universal to a large variety of different gratings, the focus is on one-dimensional (1D) and two-dimensional (2D) gratings.