Surface chemical analysis -- Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres

Surface chemical analysis -- Determination of lateral resolution and sharpness in beam based methods with a range from nanometres to micrometres

Standard Number ISO 18516:2019
Organization International Organization for Standardization World
Level International
Category Specification
Status
  • JAN 2019 Published
ABSTRACT
This document describes methods for measuring lateral resolution and sharpness in imaging surface chemical analysis. It applies to all methods of surface analysis which use a beam to analyse the chemical composition of surfaces under defined settings of an instrument. It applies to scanning instruments, where a finely focused beam is scanned over the sample in a preselected field of view, as well as to full field imaging instruments, where the field of view is simultaneously imaged by a broad beam, an imaging lens system and a pixelated detector. The methods for measuring lateral resolution and sharpness are — the straight edge method; — the narrow line method; — the grating method. This document applies to instruments and methods that provide information on layers with nanometre thicknesses and to surfaces with nanometre‐sized structures and individual nano‐objects.