Cleanrooms and associated controlled environments -- Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration

Cleanrooms and associated controlled environments -- Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration

Standard Number ISO 14644-12:2018
Organization International Organization for Standardization World
Level International
Category Specification
Status
  • AUG 2018 Published
ABSTRACT
This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.