Nanotechnology — Measurement of particle size and shape distribution using scanning electron microscopy

This standard specifies methods for determining nanoparticle size and shape distribution by acquiring and evaluating scanning electron microscope images, and obtaining and reporting accurate results. This standard applies to particles with lower size limits that are dependent on the required uncertainty and adequate performance of the SEM, which must first be demonstrated in accordance with the requirements described in this standard. This standard also applies to SEM-based size and shape measurements of particles larger than the nanoscale.