Nanotechnology — Guidelines for the Application of Ellipsometric Spectroscopy to Assess the Thickness of Nanoscale Films

This technical report focuses on a practical procedure for ellipsometry to assess the thickness of nanoscale films. While it does not specify the specifications of the ellipsometry instrument, it does suggest methods for minimizing data variability and improving data reproducibility. This document includes: an overview of the ellipsometry procedure, a discussion of results interpretation and data analysis, and a case study.