Nanotechnology — Vocabulary — Part 8: Nanofabrication Processes

This standard defines terms related to nanofabrication processes in the field of nanotechnology. While all process terms in this standard are relevant to nanofabrication, many are not exclusively nanoscale. Non-exclusive terms are specified in the definitions. Depending on controllable conditions, these processes can produce material features at the nanoscale or larger. Numerous terms that refer to tools, components, materials, system control methods, or measurement methods related to nanofabrication are not covered in this standard. Terms and definitions from other parts of the ISO/TS 80004 series are provided in Section 3 to provide context and understanding.