This standard specifies requirements for instrumented nanoindentation test the ability of the instrument 's basic requirements and test methods, but also provides for instrument calibration and testing, pressure head, the requirements of the standard sample, and instrumentation flexibility and determination of indenter area function methods, and given to determine the hardness and materials parameters required for data analysis methods and precautions for using the indenter. This standard applies to test a variety of materials and thin film hardness, modulus, and its indentation depth range is usually nanoscale, which can also be extended to a few microns.