This standard specifies the quantitative determination of nano- steel surface, sub-micron scale thin-film (metal coating and the oxide film) in thickness, the coating quality (per unit area) and the depth distribution of the elements of the film. This method is applicable to the determination of a thickness of 3nm ~ 1000nm steel surface film, suitable elements include: iron, chromium, nickel, copper, titanium, manganese, aluminum, carbon, phosphorus, oxygen, nitrogen and silicon.
