Micro nano standard samples（geometric）

This standard specifies the terms and definitions, types and basic parameters, requirements, inspection conditions, inspection methods, markings, transportation and storage of micro-nano standard templates (geometric quantities). This standard is applicable to the micro-nano wire spacing standard template with the line spacing of 0.05um��10um, the micro-nano step height standard template with the step height of 0.01um��100um, the nano film thickness standard template with the film thickness of 2nm��1000um and the line width Nanowire width standard model of 25nm��1000um.