Micro-electromechanical systems(MEMS) technology - Impact test method for nanostructures of silicon based MEMS

Micro-electromechanical systems(MEMS) technology - Impact test method for nanostructures of silicon based MEMS

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Standard Number GB/T 42896-2023
Organization Standardization Administration of China China
Level National
Category Test Method | Characterization | Measurement
Status
  • AUG 2023 Published
ABSTRACT

This document describes the requirements and tests for impact testing along the thickness direction of nanoscale membrane structures involved in silicon-based MEMS manufacturing technology method.
This document is suitable for testing the impact resistance of nanoscale structures manufactured using microelectronics technology under an impact load.