Standard Number | GB/T 42897-2023 |
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Organization |
Standardization Administration of China
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Level | National |
Category | Test Method | Characterization | Measurement |
Status |
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This document describes the requirements and tests for in-situ testing of the axial tensile strength of nanometer-thick films involved in silicon-based MEMS processing method.
This document is suitable for tensile strength testing of nanometer-thick films manufactured using microelectronics processes.