Nanotechnology - Measurement methods for carrier mobility and sheet resistance of graphene films of sub-nanometer thickness

This paper describes the principle of sample preparation and carrier mobility and sheet resistance measurements of Hall devices in sub-nanometer thick graphene films. The instrument includes the principles, equipment, device preparation and measurement process, calculation methods, analysis and calculation of uncertainty, and measurement reports. This document applies to the carrier mobility of sub-nanometer thick graphene films with length and width greater than 100 μm. (< 104cm2/Vs) and sheet resistance measurements.