Microbeam analysis -- Analytical electron microscopy -- Selected-area electron diffraction analysis using a transmission electron microscope "

This standard specifies a transmission electron microscope (TEM) of thin crystal micron and submicron size of the sample area electron diffraction constituency Shot method analysis. The test sample can be obtained from a variety of thin sections of metal or non-metallic materials, may be used fine powder or extract Replica sample. The minimum sample selection can be analyzed by this method depends on the diameter of the spherical aberration coefficient microscope objective, for the modern TEM, again The minimum diameter of the sample selection generally up to 0.5μm. When the diameter of the sample being analyzed area is smaller than 0.5μm still can refer to the standard method of analysis, but due to the spherical aberration, Yan Some of the information on the radio spectrum is likely to come from the area defined by a stop outside the constituency, in this case, as conditions allow, the best micro (Na) convergent beam electron diffraction or diffraction methods. The successful application of selected area electron diffraction method depends on the diffraction index of the obtained calibration is correct or not, and regardless of which of the grain sample With axis parallel to the incident electron beam, and therefore, such an analysis often require tilting and rotating means sample. This standard applies to get SAED spectrum from the crystal sample, the calibration constant index diffraction diffraction and electron microscope calibration.