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Measurement methods of drift rate of scanning probe microscope

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Standard Number	GB/T 29190-2012
Organization	Standardization Administration of China
Level	National
Category	Terminology \| Vocabulary \| Definition
Status	DEC 2012 Published

ABSTRACT

This standard specifies the SPM drift rate terminology and definitions, abbreviations, measurement procedures, performance parameters specifications, and scanned images based on SPM drift rate measurement basic method.