Test method for calibrating the z-magnification of an atomic force microscope at subnanometer displacement levels using si (111) monatomic steps

Standard Number GB/T 27760-2011
Organization Standardization Administration of China China
Level National
Category Test Method | Characterization | Measurement
Status
  • DEC 2011 Published
  • DEC 2016 Reviewed and Confirmed
ABSTRACT
This standard specifies the use of Si (111) crystal surface atomic step height z atomic force microscope sample calibration to standard measurement method. This standard applies to work under atmospheric or vacuum atomic force microscope, and the z order to achieve maximum magnification, ie z displacement in the nanometer and sub-nanometer range, which is the atomic force microscope is used to detect the semiconductor surface, optical devices surfaces and other high-tech component surface frequently used detection range. This standard does not indicate that all possible security problems in the application of this standard, the user has the responsibility to take appropriate safety and health practices and to ensure compliance with the relevant regulations of the condition.