Test method for calibrating the z-magnification of an atomic force microscope at subnanometer displacement levels using si (111) monatomic steps

This standard specifies the microscope z-direction scale measurement methods utilizing Si (111) crystal plane atomic step height calibration sample atomic force. This standard applies to work under atmospheric or vacuum atomic force microscope, and the z-direction magnification ratio reaches maximum magnitude, ie z Displacement in the nanometer and sub-nanometer range, which is an atomic force microscope is used to detect the surface of a semiconductor, optics and other high-tech surface element Surface frequently used detection range. This standard does not point out all possible security issues before the application of this standard, the user's responsibility to take appropriate safety and health measures Facilities, and to ensure compliance with the conditions relevant national regulations.

NOTE. The standard values \u200b\u200bto international units specified as a standard value, insert values \u200b\u200bin parentheses are for reference only.