Sino-semic, the first all-Chinese developer and manufacturer of vertical-cavity surface-emitting lasers (VCSELs) for face recognition, noted that process capability and local support were key factors in its decision to adopt the high-performance inductively coupled plasma (ICP) etch Cobra systems.
“We chose Oxford Instruments to supply our ICP etch equipment because they offer cutting-edge plasma processing systems and unrivaled process support, which will be invaluable to us during our production scheme,” said Li Jun, vice general manager at Sino-semic. The Cobra process solutions are designed to support device applications such as lasers, radio frequency, power, and advanced LEDs.
“VCSEL-based devices are entering another exciting phase of growth,” said Richard Pollard, managing director at OIPT. “We are thrilled to be providing our VCSEL processing solutions to a pioneering production manufacturer such as Sino-semic.”
OIPT offers flexible, configurable process tools and processes for the precise, controllable, and repeatable engineering of micro- and nano-structures.
