Date18th, Nov 2019

Summary:

Atomic layer deposition (ALD) involves stacking layers of atoms on top of each other like pancakes. The atoms come from a vaporized material called a precursor. ASD is a well-established technique for...

Full text:

Home > Press > A cheaper way to scale up atomic layer deposition

This is an artistic illustration of atomic layer deposition.

CREDIT
J. Luterbacher (EPFL) This is an artistic illustration of atomic layer deposition. CREDIT J. Luterbacher (EPFL)

Abstract: Atomic layer deposition (ALD) involves stacking layers of atoms on top of each other like pancakes. The atoms come from a vaporized material called a precursor. ASD is a well-established technique for manufacturing microelectronics like semiconductors and magnetic heads for sound recording, as well as sensors for bioengineering and diagnostics.

Lausanne, Switzerland | Posted on November 15th, 2019

However, using ALD for depositing layers on larger surfaces has been a struggle, especially when it comes to manufacturing materials that must be kept at low cost, e.g. catalysts and solar devices.

"The sticking point is not necessarily making the right material but making it cheaply," explains Professor Jeremy Luterbacher, head of EPFL's Laboratory of Sustainable and Catalytic Processing (LPDC). "Coating larger surface areas with gas-phase methods requires long deposition times, and huge excesses of precursor, both of which increase costs," adds Benjamin Le Monnier, the PhD student who performed most of the research.

Now, the LPDC has developed a solution. Using ALD in a liquid phase, the scientists can produce materials indistinguishable from those made in the gas phase, with far cheaper equipment and no excess precursors.

Greater precision cuts costs

The researchers achieved this breakthrough by carefully measuring the ratio of the reacting precursors before injecting them onto the surface of a substrate. This way, they used exactly the right amount of precursor, with no leftovers that can cause unwanted reactions or be wasted.

The new method also reduces costs by requiring only standard lab equipment for chemical synthesis. It can also be easily scaled up to coat more than 150 g of material with the same cheap equipment, without loss of coating quality. The technique can even achieve coatings that are not possible using gas-phase ALD, e.g. by using non-volatile precursors.

"We believe that this technique could greatly democratize the use ALD on catalysts and other high surface area materials," says Luterbacher.

####

For more information, please click here

Contacts:Nik Papageorgiou

41-216-932-105

@EPFL_en

Copyright © Ecole Polytechnique F�d�rale de Lausanne

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark: Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Reference

News and information

Two opposing approaches could give lithium-sulfur batteries a leg up over lithium-ion July 1st, 2022

Robot nose that can �smell� disease on your breath: Scientists develop diagnostic device for identifying compounds unique to particular diseases July 1st, 2022

Efficiently processing high-quality periodic nanostructures with ultrafast laser July 1st, 2022

Photonic synapses with low power consumption and high sensitivity are expected to integrate sensing-memory-preprocessing capabilities July 1st, 2022

2 Dimensional Materials

Controlled synthesis of crystal flakes paves path for advanced future electronics June 17th, 2022

Solving the puzzle of 2D disorder: An interdisciplinary team developed a new method to characterize disorder in 2D materials June 17th, 2022

UBCO researchers change the game when it comes to activity tracking: Flexible, highly sensitive motion device created by extrusion printing June 17th, 2022

Bumps could smooth quantum investigations: Rice University models show unique properties of 2D materials stressed by contoured substrates June 10th, 2022

Possible Futures

Technologies boost potential for carbon dioxide conversion to useful products: Researchers explore use metal-organic frameworks based catalysts for hydrogenation of carbon dioxide July 1st, 2022

Sieving carbons: Ideal anodes for high-energy sodium-ion batteries July 1st, 2022

An artificial intelligence probe help see tumor malignancy July 1st, 2022

Photon-controlled diode: an optoelectronic device with a new signal processing behavior July 1st, 2022

Chip Technology

Photon-controlled diode: an optoelectronic device with a new signal processing behavior July 1st, 2022

Photonic synapses with low power consumption and high sensitivity are expected to integrate sensing-memory-preprocessing capabilities July 1st, 2022

Advances in lithium niobate photonics: High performance integrated LN-based photonic devices have developed rapidly in recent years, and many different structures have been demonstrated for various application scenarios�are we about to enter a new era of LN photonics? June 24th, 2022

Advances in lithium niobate photonics: High performance integrated LN-based photonic devices have developed rapidly in recent years, and many different structures have been demonstrated for various application scenarios�are we about to enter a new era of LN photonics? June 24th, 2022

Discoveries

Technologies boost potential for carbon dioxide conversion to useful products: Researchers explore use metal-organic frameworks based catalysts for hydrogenation of carbon dioxide July 1st, 2022

Sieving carbons: Ideal anodes for high-energy sodium-ion batteries July 1st, 2022

Efficiently processing high-quality periodic nanostructures with ultrafast laser July 1st, 2022

Photonic synapses with low power consumption and high sensitivity are expected to integrate sensing-memory-preprocessing capabilities July 1st, 2022

Announcements

Two opposing approaches could give lithium-sulfur batteries a leg up over lithium-ion July 1st, 2022

Robot nose that can �smell� disease on your breath: Scientists develop diagnostic device for identifying compounds unique to particular diseases July 1st, 2022

Efficiently processing high-quality periodic nanostructures with ultrafast laser July 1st, 2022

Photonic synapses with low power consumption and high sensitivity are expected to integrate sensing-memory-preprocessing capabilities July 1st, 2022

Interviews/Book Reviews/Essays/Reports/Podcasts/Journals/White papers/Posters

Technologies boost potential for carbon dioxide conversion to useful products: Researchers explore use metal-organic frameworks based catalysts for hydrogenation of carbon dioxide July 1st, 2022

Sieving carbons: Ideal anodes for high-energy sodium-ion batteries July 1st, 2022

An artificial intelligence probe help see tumor malignancy July 1st, 2022

Photon-controlled diode: an optoelectronic device with a new signal processing behavior July 1st, 2022

Tools

New technology helps reveal inner workings of human genome June 24th, 2022

Snapshot measurement of single nanostructure�s circular dichroism March 25th, 2022

Eyebrow-raising: Researchers reveal why nanowires stick to each other February 11th, 2022

JEOL Introduces New Scanning Electron Microscope with �Simple SEM� Automation and Live Elemental and 3D Analysis January 14th, 2022