Labtech is pleased to announce the latest innovation from Kleindiek NanoTechnik - the PS8e, a fully encoded, high-end nanoprobing solution. As current and future device technology gets ever smaller at the nanoscale there is also the risk of the devices being more sensitive to beam-induced damage. With this new compact nanoprobing innovation it is now possible to perform entire workflows at very low acceleration voltages.
Kleindiek PS8e. Image Credit: Labtech International Ltd.
The PS8e has the added advantage of being able to park and restore the probe tips at the click of a button. It can also store and revisit various regions of interest on the sample which is a significant time saver. To further enhance its capabilities a new heating/cooling stage MHCS-PS is available for the PS8e and PS8 prober shuttles allowing the testing of devices over a wide temperature range (–20°C - +100°C).
Kleindiek continue to innovate in the field of fault localization methods with the introduction of EBIV (Electron Beam Induced Voltage). This method complements EBIC (Electron Beam Induced Current) and is especially useful for locating 'soft', low-ohmic failures that other methods (such as EBAC or RCI) have trouble identifying. Download a paper on EBIV in the 2020 Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) from our website.
