Cleanrooms and associated controlled environments. Part 12. Specifications for monitoring air cleanliness b nanoscale particle concentration

This standard establishes requirements for routine air quality monitoring based on the concentration of aerosol particles in the nanoscale range. For the purposes of this standard, only particles with a threshold size of 0.1 µm (100 nm) and below—the so-called "nanoscale"—are used. The routine monitoring presented in this standard is primarily applicable to operational conditions.