This document defines a list of terms related to nanofabrication processes in the field of nanotechnologies. In this document, all process-related terms refer to nanofabrication; however, many of the methods mentioned do not relate exclusively to the nanoscale. When terms are not exclusive to nanofabrication, this is indicated in their definition. Depending on whether the conditions are controllable or not, such processes can give rise to materials at the nanometric scale or at larger scales.
