Standard Practice for Calibrating the Z-Magnification of an Atomic Force Microscope at Subnanometer Displacement Levels Using Si(111) Monatomic Steps

This practice covers a measurement procedure to calibrate the z-scale of an atomic force microscope using Si(111) monatomic step height specimens. Applications This procedure is applicable either in ambient or vacuum condition when the atomic force microscope (AFM) is operated at its highest levels of z-magnification, that is, in the nanometer and sub-nanometer ranges of z-displacement. These ranges of measurement are required when the AFM is used to measure the surfaces of semiconductors, optical surfaces, and other high technology components.