Measuring and Reporting Vibrations in Advanced Technology Facilities

This Recommended Practice (RP), IEST-RP-NANO-207, will provide guidance for vibration measurements and standardized reporting with regard to sensitive equipment used in facilities for nanoscale R&D or production. The target audience includes facilities such as nanotechnology, pharmaceutical and biological research, metrology laboratories, and other contexts in which vibration control is important, as well as being applicable in the microelectronics industry.