Nanotechnologies -- Measurements of particle size and shape distributions by scanning electron microscopy

This document specifies methods for determining nanoparticle size and shape distributions by acquiring and evaluating scanning electron microscope images and obtaining and reporting accurate results.
NOTE 1 This document applies to particles with a lower size limit that depends on the required uncertainty and on the appropriate SEM performance to be checked first - in accordance with the requirements described in this document.
NOTE 2 This document also covers SEM-based measurements of particle size and shape at the larger than nanoscale.