Microbeam analysis - Method of thickness measurement for thin crystals by convergent beam electron diffraction

This document describes Converged Beam Electron Diffraction for Thickness Measurement of Thin Crystal Specimens Using Transmission Electron Microscopy/Scanning Transmission Electron Microscopy method: This document is suitable for the determination of thin crystal samples with linearity ranging from tens of nanometers to hundreds of micrometers and thicknesses in the range of tens of nanometers to hundreds of nanometers: thickness: Note: Since the thickness of thin specimens for transmission electron microscopy is often non-uniform, what is measured by the method of convergent beam diffraction is the local thickness of the specimen illuminated by the electron beam: