Clean rooms and clean areas. Part 1: Purity classification based on particle content

Clean rooms and clean areas. Part 1: Purity classification based on particle content

Standard Number SFS-EN ISO 14644-1: 2015 / Correction: 2019
Organization Finnish Standards Association Finland
Level National
Category Test Method | Characterization | Measurement
Status
  • SEP 2019 Published
ABSTRACT
This part of ISO 14644 defines the purity classification of clean rooms and clean zones and insulated cabinets and rooms according to ISO 14644‑7 on the basis of airborne particulate matter. For the particle populations, only concentrations between 0.1 µm k 5 µm in the cumulative distribution are taken into account. The determination of the particulate concentration in the air at the designated sampling points is based on the light scattering method (LSAPC) used for particle counting when the particle size is equal to or greater than the specified values. This part of ISO 14644 is not applicable to classification according to particle size populations outside the defined range of 0,1 µm… 5 µm. Concentrations of ultrafine particles (particle size less than 0.1 µm) are addressed in their own standard, where classification is based on nanoparticles. The term M can be used to calculate macroparticle populations (particle size greater than 5 µm) (see Appendix C). This part of ISO 14644 cannot be used to characterize without the physical, chemical, radiological or living nature of the particles.