Nanotechnology - Measurement of particle shape and size distributions using scanning electron microscopy

This standard specifies methods for determining the shape and size distributions of nanoparticles by acquiring and evaluating scanning electron microscope images and obtaining and reporting accurate results. This document applies to particles with a lower size limit that depends on the required uncertainty and adequate performance of the SEM, which must be evaluated first - according to the requirements described in this document. This document also applies to SEM-based size and shape measurements of particles larger than the nanoscale.