Cleanrooms and Controlled Environments — Part 12: Requirements for monitoring air quality based on nanoscale particle concentration

Cleanrooms and Controlled Environments — Part 12: Requirements for monitoring air quality based on nanoscale particle concentration

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Standard Number KS I ISO 14644-12:2020
Organization Korean Agency for Technology and Standards South Korea
Level National
Category Specification
Status
  • AUG 2020 Published
ABSTRACT

This standard deals with the monitoring of air quality by particle in terms of the concentration of airborne nanoscale particles.