Cleanrooms and associated controlled environments — Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration

This standard specifies the monitoring of air cleanliness in terms of the concentration of airborne nanoscale particles. For monitoring purposes, only particles with a size limit of 0.1 micron (100 nm) or less (nanoscale) are considered. The monitoring provided in this standard is primarily intended for use under “operational conditions”.

NOTE 1: For the purpose of this standard, “nanoscale particles” means nanoobjects of any dimension at the nanoscale, including one-dimensional (nanoflates), two-dimensional (nanofibers) or three-dimensional (nanoparticles).

NOTE 2: Consequently, the requirements for monitoring air cleanliness in cleanrooms under operational conditions should take into account the specifics of the work, such as the equipment used and the behavior of personnel.

NOTE 3: Health and safety considerations are excluded from this standard.