Clean spaces and similar controlled environments - Part 12: Classification of air purity by nanoscale particle concentration

Clean spaces and similar controlled environments - Part 12: Classification of air purity by nanoscale particle concentration

Standard Number NEN-ISO 14644-12: 2018
Organization Netherlands Standardization Institute Netherlands
Level National
Category Specification
Status
  • SEP 2018 Published
ABSTRACT
NEN-ISO 14644-12 covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles. For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less - “nanoscale” - are considered. The monitoring given in this document is for use mainly in “operational” states.